1. The air cleanliness of the clean room should be tested as follows
(1) Empty state, static test
Empty state test: The clean room has been completed, the purified air conditioning system is in normal operation, and the test is carried out without process equipment and production personnel in the room.
Static test: The clean room purification air conditioning system is in normal operation, the process equipment has been installed, and the test is carried out without production personnel in the room.
(Two) dynamic test
The clean room has been tested under normal production conditions.
The detection of air volume, wind speed, positive pressure, temperature, humidity, and noise in the clean room can be carried out in accordance with the relevant regulations of general use and air conditioning.
Clean room (area) air cleanliness level table
|Cleanliness level||Maximum allowable number of dust particles/m3≥0.5μmNumber of dust particles||≥5μmNumber of dust particles||Maximum allowable number of microorganisms